SUPERSiC® grades are used for components in both
horizontal and vertical systems.
Finished products are designed with features that
reduce thermal mass while retaining high strength.
Features include oxidation resistance, high purity,
reduced particle generation and unaffected by typical
semiconductor wet chemistries.
POCO's line of SUPERSiC silicon carbide dummy and baffle wafers provide the user with maximum flexibility while meeting SEMI standard wafer dimensions.
POCO offers wafer carrier solutions that all horizontal furnace systems.
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