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CVD/Diffusion

SUPERSiC® grades are used for components in both horizontal and vertical systems.

 

Finished products are designed with features that reduce thermal mass while retaining high strength. Features include oxidation resistance, high purity, reduced particle generation and unaffected by typical semiconductor wet chemistries.

  

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Dummy Wafers

POCO's line of SUPERSiC silicon carbide dummy and baffle wafers provide the user with maximum flexibility while meeting SEMI standard wafer dimensions.

Horizontal Carriers

POCO offers wafer carrier solutions that all  horizontal furnace systems.