POCO offers wafer carrier
solutions that all horizontal furnace systems.
SUPERSiC® products include intermediate carriers, several styles of horizontal
carriers, baffle assemblies, cage boats, dummy wafers and pickup tools.
SiC horizontal carriers are used extensively in polysilicon,
silicon nitride, and doped oxide CVD processes, as
well as in gate oxide processes. In high temperature
anneals and implant drive furnaces, POCO's uncoated
SiC carriers have shown performance that is without
equal. Individual fabs have been using the same carriers
for over 3 years, through multiple clean and maintenance
cycles, in which the process tubes and other furnace
internals have been replaced.