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Horizontal Carriers

POCO offers wafer carrier solutions that all  horizontal furnace systems. SUPERSiC® products include intermediate carriers, several styles of horizontal carriers, baffle assemblies, cage boats, dummy wafers and pickup tools.

 

POCO's SiC horizontal carriers are used extensively in polysilicon, silicon nitride, and doped oxide CVD processes, as well as in gate oxide processes. In high temperature anneals and implant drive furnaces, POCO's uncoated SiC carriers have shown performance that is without equal. Individual fabs have been using the same carriers for over 3 years, through multiple clean and maintenance cycles, in which the process tubes and other furnace internals have been replaced.

  

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For over forty years, POCO has been recognized for producing the world's best graphites.

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News, Quality Program and Contact information for Poco Graphite