Graphite and SUPERSiC
components are produced to customer prints.
SUPERSiC® silicon carbide, is
typically used for plasma etch electrodes, showerheads,
focus rings, hot edge rings, confinement rings and
other chamber components. SUPERSiC is the ideal
material for current and legacy equipment as replacement
components for silicon, quartz and other ceramics to
improve process performance.
Currently, all SUPERSiC etch chamber components are
custom made for OEMs to go in the next generation equipment.
Currently, all graphite etch chamber components
are machined to customer prints. Typical graphite parts
are backing rings, edge rings, backing plates, cathodes,
bias plugs and pins. Materials used for these applications
are DFP-1 and DFP-2.
Note that you will be redirected to our parent company website, entegris.com, to search available positions
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