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POCO
PyroGraph |
Pyrograph is pyrolytically
infiltrated graphite. POCO's proprietary process infiltrates
the base material to a minimum depth of 0.1 inch throughout
the entire surface of the component. This process seals
the graphite surface and reduces particle generation
in the chamber.
The manufacturing process begins with a specially
formulated graphite. Once a part has been machined,
it goes through a purification process that typically
results in a purity level of < 2ppm. The final step
is a pyrolytic vapor infiltration that produces a hard,
uniform surface. Vapor phase processing allows deeper
penetration of the pyrolytic carbon into the base material. |
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Typical Purified Poco Graphite: GDMS Elemental Data Analysis |
Na |
<0.005* |
Mg |
<0.005* |
Al |
0.09 |
K |
<0.005* |
Ca |
<0.005* |
Ti |
0.02 |
V |
0.002 |
Mn |
<0.001* |
Fe |
0.03 |
Ni |
0.01 |
Cu |
<0.001* |
Zn |
<0.005* |
*Denotes value below detection limits |
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Typical Material Properties |
Particle Size |
1 |
4 |
6 |
5 |
Apparent Density (g/cc) |
1.77 |
1.82 |
1.77 |
1.56 |
Flexural Strength (psi) |
15,000 |
12,000 |
13,500 |
7,750 |
Compressive Strength (psi) |
30,000 |
20,000 |
25,000 |
14,200 |
Electrical Resistivity (µ-ohm-in) |
1,260 |
600 |
960 |
790 |
Shore Hardness |
100 |
74 |
91 |
66 |
CTE(µ-in/in/C) |
8.4 |
8.1 |
7.6 |
7.5 |
Purity |
99.9995% |
99.9995% |
99.9995% |
99.9995% |
Pyrolytic Carbon |
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12% pick-up |
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Additional Information
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Careers
Note that you will be redirected to our parent company website, entegris.com, to search available positions
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Contacts
Get address, phone, fax and email information for POCO and its Distributors
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EDM Distributors
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EDM Training
EDM training classes Free to the industry
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Entegris
Entegris welcomes POCO to the family
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How to Buy
POCO products are available through a variety of outlets
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Literature
Download information about specific POCO products or Safety Data Sheets (SDS)
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Terms and Conditions
View POCO's terms and conditions of sale
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