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POCO PyroGraph

Pyrograph is pyrolytically infiltrated graphite. POCO's proprietary process infiltrates the base material to a minimum depth of 0.1 inch throughout the entire surface of the component. This process seals the graphite surface and reduces particle generation in the chamber.

 

The manufacturing process begins with a specially formulated graphite. Once a part has been machined, it goes through a purification process that typically results in a purity level of < 2ppm. The final step is a pyrolytic vapor infiltration that produces a hard, uniform surface. Vapor phase processing allows deeper penetration of the pyrolytic carbon into the base material.

  

Typical Purified Poco Graphite: GDMS Elemental Data Analysis

Element Concentration (ppm wt)
Na <0.005*
Mg <0.005*
Al 0.09
K <0.005*
Ca <0.005*
Ti 0.02
V 0.002
Mn <0.001*
Fe 0.03
Ni 0.01
Cu <0.001*
Zn <0.005*
*Denotes value below detection limits
 

Typical Material Properties

  ZEE DFP-3-2 SCF-2 PYROGRAPH
Particle Size 1 4 6 5
Apparent Density (g/cc) 1.77 1.82 1.77 1.56
Flexural Strength (psi) 15,000 12,000 13,500 7,750
Compressive Strength (psi) 30,000 20,000 25,000 14,200
Electrical Resistivity (µ-ohm-in) 1,260 600 960 790
Shore Hardness 100 74 91 66
CTE(µ-in/in/C) 8.4 8.1 7.6 7.5
Purity 99.9995% 99.9995% 99.9995% 99.9995%
Pyrolytic Carbon       12% pick-up